Name
AFT Instrument
What We Do
AFT is a specialized supplier of high-purity ozone generators and ozone delivery systems for semiconductor manufacturing. AFT develops ultra-clean, high-concentration ozone technology optimized for ALD, CVD, wafer cleaning, photoresist stripping, and surface conditioning processes.
Our product portfolio includes compact point-of-use generators, high-output generators, scalable parallel platforms, and integrated multi-channel ozone supply systems. AFT systems provide precise ozone concentration and flow control with minimal footprint and system complexity.
A key advantage of AFT technology is dopant-free operation capability, enabling reduced gas consumption and simplified facility integration while maintaining high ozone purity. In addition to standard products, AFT offers fully customized ozone systems for OEM tools and non-standard fab environments. AFT technology is field-proven in advanced semiconductor fabs.
Our product portfolio includes compact point-of-use generators, high-output generators, scalable parallel platforms, and integrated multi-channel ozone supply systems. AFT systems provide precise ozone concentration and flow control with minimal footprint and system complexity.
A key advantage of AFT technology is dopant-free operation capability, enabling reduced gas consumption and simplified facility integration while maintaining high ozone purity. In addition to standard products, AFT offers fully customized ozone systems for OEM tools and non-standard fab environments. AFT technology is field-proven in advanced semiconductor fabs.
Website
Categories (50)
Cleaning; Washing; Drying Equipment for Substrate, Fab Processing, Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD, Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment , Gas; Liquid delivery panels as subsystems
Phone
82-1091591896
Address
1313~4, Bldg A, 58-1
Giheung-ro, Giheung-gu
Yongin-si, 16976
Giheung-ro, Giheung-gu
Yongin-si, 16976