Name
AUROS TECHNOLOGY, INC.
What We Do
AUROS Technology is a specialized semiconductor metrology and inspection equipment provider, delivering precision measurement solutions across front-end and advanced packaging processes.
Overlay Metrology
AUROS offers a comprehensive overlay metrology lineup, covering high-end front-end overlay measurement as well as IR overlay solutions for advanced processes. In addition to leading-edge systems, AUROS provides mass-production-proven 8-inch overlay platforms, supporting both mature and advanced fabs with stable and reliable performance.
Advanced Packaging MI Solutions
To address the rapid adoption of advanced packaging technologies, AUROS has developed a range of metrology solutions for warpage and 3D measurement. These systems are designed to handle complex vertical structures and non-uniform surfaces commonly found in HBM and advanced packaging processes. AUROS also provides 3D metrology solutions capable of measuring substrates.
Thickness Metrology
Through extensive in-house R&D, AUROS has successfully localized thickness metrology technology. In 2024, AUROS launched its 12-inch thickness metrology system.
Overlay Metrology
AUROS offers a comprehensive overlay metrology lineup, covering high-end front-end overlay measurement as well as IR overlay solutions for advanced processes. In addition to leading-edge systems, AUROS provides mass-production-proven 8-inch overlay platforms, supporting both mature and advanced fabs with stable and reliable performance.
Advanced Packaging MI Solutions
To address the rapid adoption of advanced packaging technologies, AUROS has developed a range of metrology solutions for warpage and 3D measurement. These systems are designed to handle complex vertical structures and non-uniform surfaces commonly found in HBM and advanced packaging processes. AUROS also provides 3D metrology solutions capable of measuring substrates.
Thickness Metrology
Through extensive in-house R&D, AUROS has successfully localized thickness metrology technology. In 2024, AUROS launched its 12-inch thickness metrology system.
Website
Categories (50)
Film Thickness; Thickness; Uniformity Measurement; Ellipsometer, Overlay Measurement, Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
Phone
82-31-8046-8844
Address
3rd, 15-23, Dongtansandan 6-gil, Dongtan-myeon
Hwaseong-si, Gyeonggi-do 18487
Hwaseong-si, Gyeonggi-do 18487